Dynax 65AX-089 Wafer Transfer Robot Set, 320mm Module

Operating Range:320mm

Maximum Load Capacity:30kg

Speed Control:Variable Speed Motor

Cleanroom Compatibility:Class 100 Cleanroom Certified

Robust Construction:Stainless Steel Frame

Safety Features:Emergency Stop, Overload Protection

    The Dynax 65AX-089 Wafer Transfer Robot Set is specifically engineered for the seamless handling of wafers within the semiconductor industry. Its advanced design ensures precise and efficient transfer, minimizing the risk of damage and optimizing production throughput.

    Featuring a versatile arm span of 320mm, this robot set is perfectly suited for a wide range of tasks in the manufacturing process, from wafer loading to transfer to inspection stations.

    With a maximum load capacity of up to 5kg, it can handle various wafer sizes and types with ease. The variable operating speed and high precision positioning capability (±0.05mm) ensure both safety and accuracy in every operation.

    Equipped with an efficient power supply system and an EtherCAT control system, the Dynax 65AX-089 facilitates seamless integration into existing factory automation networks. Its communication protocol, Modbus TCP/IP, allows for robust data exchange with other systems.

    Notably, this robot set is designed with durability in mind. Its compact yet robust structure, weighing approximately 120kg, ensures stable operation under demanding conditions. Moreover, it is designed to operate within a wide temperature range (0°C to 40°C) and withstand moderate humidity levels (10% to 80% RH), making it suitable for a variety of industrial environments.