Operating Range:-40°C to +100°C (-40°F to +212°F)
Accuracy:+/- 1% of reading or +/- 2 Pa (±0.1 Torr)
Response Time:< 5 seconds
Pressure Measurement Range:0.01 Pa to 100 kPa (0.001 Torr to 1000 Torr)
Vacuum Sensor Technology:Cold Traps, Ion Gauge, and Thermal Gauge
Power Consumption:Less than 50 mW
Connection Type:M20 Female Socket, Two Electrical Connections, SUS316 Blind Plug
The INFICON SMTBM20A is engineered with advanced thermocouple technology for unparalleled precision in vacuum measurements, essential for maintaining optimal process conditions in semiconductor fabrication.
Featuring a compact and robust design, this module ensures reliable operation within a wide temperature range, from -20°C to +60°C, ensuring consistent performance across various manufacturing environments.
With an impressive response time of less than 10 seconds, the SMTBM20A enables rapid adjustment and optimization of vacuum conditions, enhancing overall efficiency and productivity in semiconductor production lines.
Equipped with low power consumption, the module operates efficiently without compromising on performance, making it an eco-friendly solution for sustainable manufacturing processes.
Designed with ease-of-integration in mind, the INFICON SMTBM20A seamlessly connects to existing systems, minimizing downtime and facilitating quick installation, thus streamlining the setup and maintenance processes.
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